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J-GLOBAL ID：200902222741080960   Reference number：08A0005190

Hexagonal BCN Films Prepared by RF Plasma-enhanced CVD

RFプラズマ強化CVDで調製した六方晶BCN膜

Author (4)： MANNAN Md. Abdul (Dep. of Applied Chemistry, Fac. of Sci. and Engineering, Saga Univ.) ,  NAGANO Masamitsu (Dep. of Applied Chemistry, Fac. of Sci. and Engineering, Saga Univ.) ,  HIRAO Norie (Synchrotron Radiation Res. Unit, Quantum Beam Sci. Directorate, Japan Atomic Energy Agency) ,  BABA Yuji (Synchrotron Radiation Res. Unit, Quantum Beam Sci. Directorate, Japan Atomic Energy Agency)
Material： Chemistry Letters  (Chem Lett)
Volume： 37  Issue： 1  Page： 96-97 (J-STAGE)  Publication year： 2008 
JST Material Number： S0742A  ISSN： 0366-7022  CODEN： CMLTAG  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： carbide ,...
Semi thesaurus term： carbonitride

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JST classification (2)： Salts  (CD01050V) ,  Other inorganic chemicals and inorganic materials  (YB02090K)

Reference (12)：

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• 3) H. Sun, S.-H. Jhi, D. Roundy, M. L. Chohen, S. G. Louie, Phys. Rev. B 2001, 64, 94108.
• 4) Y. Wada, Y. K. Yap, M. Yoshimura, Y. Mori, T. Sasaki, Diamond. Relat. Mater. 2000, 9, 620.
• 5) H. S. Kim, I. H. Choi, Y.-J. Baik, Surf. Coat. Technol. 2000, 133–134, 473.

Terms in the title (4)： RF ,  プラズマ強化CVD ,  調製 ,  六方晶