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J-GLOBAL ID:200902222741080960   Reference number:08A0005190

Hexagonal BCN Films Prepared by RF Plasma-enhanced CVD

RFプラズマ強化CVDで調製した六方晶BCN膜
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Volume: 37  Issue:Page: 96-97 (J-STAGE)  Publication year: 2008 
JST Material Number: S0742A  ISSN: 0366-7022  CODEN: CMLTAG  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Salts  ,  Other inorganic chemicals and inorganic materials 
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