Art

J-GLOBAL ID：200902222952386640   Reference number：05A1045226

Reference sample for the evaluation of SEM image resolution at a high magnification-nanometer-scale Au particles on an HOPG substrate

HOPG基板上の高拡大-ナノメータスケールAu粒子におけるSEMイメージ分解能評価のための参照試料

Author (3)： OKAYAMA Shigeo (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  HARAICHI Satoshi (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  MATSUHATA Hirofumi (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
Material： Journal of Electron Microscopy  (J Electron Microsc)
Volume： 54  Issue： 4  Page： 345-350  Publication year： Aug. 2005 
JST Material Number： W1384A  ISSN： 0022-0744  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *scanning electron microscope ,...
Semi thesaurus term： HOPG

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JST classification (1)： Electron and ion microscopes  (BD02050B)

Reference (10)：

• FRANK, J. Observation of the relative phases of electron microscopic phase contrast zones with the aid of the optical diffractometer. Optik. 1972, 35, 608-612
• JOY, D C. Metrics of resolution and performance for CD-SEMs. Proc. SPIE. 2000, 3998, 108-114
• MATUSYA, M. Effective parameters of estimating SEM resolution by Fourier transform method. Proceedings of the Eighth Asia-Pacific Conference on Electron Microscopy, Kanazawa, 2004. 2004, 50-51
• ISHITANI, T. Contrast-to gradient method for the evaluation of image resolution in scanning electron microscopy. J. Electron Microsc. 2002, 51, 369-382
• FRANCIS, G M. Diffusion controlled growth of metallic nanoclusters at selected surface sites. J. Appl. Phys. 1996, 79, 2942-2947

Terms in the title (8)： HOPG ,  拡大 ,  Au ,  SEM ,  イメージ分解能 ,  評価 ,  参照 ,  試料