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J-GLOBAL ID：200902223797504271   Reference number：04A0357072

MULTI-LAYER ELECTROPLATED MICRO-SPRING ARRAY FOR MEMS PROBE CARD

MEMSプローブカード用の多層電気めっき微小ばねアレイ
Author (4)：
KATAOKA K

About KATAOKA K

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
ITOH T

About ITOH T

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
INOUE K

About INOUE K

(JSR Corp., Saitama, JPN)

About JSR Corp., Saitama, JPN

, 
SUGA T

About SUGA T

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN


Material：
Technical Digest. IEEE Micro Electro Mechanical Systems  (IEEE International Conference on Micro Electro Mechanical Systems)

About Technical Digest. IEEE Micro Electro Mechanical Systems


Volume： 17th  Page： 733-736  Publication year： 2004 
JST Material Number： W0377A  ISSN： 1084-6999  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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micromachine

About micromachine

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ばねアレイ

About ばねアレイ


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Buffers,springs 
(QB01110U)

About Buffers,springs

,  Electric contacts 
(NA05070V)

About Electric contacts

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
MEMS

About MEMS

, 
プローブカード

About プローブカード

, 
多層

About 多層

, 
電気めっき

About 電気めっき

, 
微小

About 微小

, 
ばね

About ばね

, 
アレイ

About アレイ


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