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J-GLOBAL ID：200902230496493637   Reference number：05A0269177

Pressure and Vibration Sensors Using Piezoresistive Effect of Polycrystalline Diamond Film

ダイヤモンド製多結晶膜の圧電抵抗効果を利用した圧力や振動センサ
Author (5)：
YAMAMOTO A

About YAMAMOTO A

(Western Industrial Res. Inst. Hiroshima Prefecture, Kure, JPN)

About Western Industrial Res. Inst. Hiroshima Prefecture, Kure, JPN

, 
NAWACHI N

About NAWACHI N

(Western Industrial Res. Inst. Hiroshima Prefecture, Kure, JPN)

About Western Industrial Res. Inst. Hiroshima Prefecture, Kure, JPN

, 
TSUTSUMOTO T

About TSUTSUMOTO T

(Western Industrial Res. Inst. Hiroshima Prefecture, Kure, JPN)

About Western Industrial Res. Inst. Hiroshima Prefecture, Kure, JPN

, 
NISHIIE H

About NISHIIE H

(Miyoshi Electronics Corp., Ltd., Miyoshi, JPN)

About Miyoshi Electronics Corp., Ltd., Miyoshi, JPN

, 
ASAHI T

About ASAHI T

(Shinkawa Sensor Technol., Inc., Higashi-Hiroshima, JPN)

About Shinkawa Sensor Technol., Inc., Higashi-Hiroshima, JPN


Material：
New Diamond and Frontier Carbon Technology  (New Diam Front Carbon Technol)

About New Diamond and Frontier Carbon Technology


Volume： 15  Issue： 1  Page： 1-11  Publication year： 2005 
JST Material Number： L1952A  ISSN： 1344-9931  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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*Diamond

About Diamond

,...
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Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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化学気相成長法

About 化学気相成長法


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JST classification (3)：
JST classification
Category name(code) classified by JST.
Carbon and its compounds 
(YB02060D)

About Carbon and its compounds

,  Measuring instruments in general 
(AD02000X)

About Measuring instruments in general

,  Piezoelectricity,pyroelectricity,electret 
(BM05040M)

About Piezoelectricity,pyroelectricity,electret

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
ダイヤモンド

About ダイヤモンド

, 
多結晶

About 多結晶

, 
圧電抵抗

About 圧電抵抗

, 
振動センサ

About 振動センサ


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