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J-GLOBAL ID:200902230496493637   Reference number:05A0269177

Pressure and Vibration Sensors Using Piezoresistive Effect of Polycrystalline Diamond Film

ダイヤモンド製多結晶膜の圧電抵抗効果を利用した圧力や振動センサ
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Volume: 15  Issue:Page: 1-11  Publication year: 2005 
JST Material Number: L1952A  ISSN: 1344-9931  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Carbon and its compounds  ,  Measuring instruments in general  ,  Piezoelectricity,pyroelectricity,electret 
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