Art
J-GLOBAL ID：200902232942494653
Reference number：06A0168375
Very Low Dielectric Constants of Diamond-Like Carbon Films Deposited on Ground Electrode by Plasma-Enhanced Chemical Vapor Deposition
プラズマ増強化学蒸着によりアース電極上に堆積したダイヤモンド状炭素膜の非常に小さい誘電定数
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Author (3)：
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Material：
Volume：
45
Issue：
2A
Page：
860-867
Publication year：
Feb. 15, 2006
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films
Substance index (1)：
Substance index
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Terms in the title (5)：
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