Art
J-GLOBAL ID：200902233256238930   Reference number：04A0418457

Analysis and Characterization of Device Variations in an LSI Chip Using an Integrated Device Matrix Array

LSIチィップにおけるデバイス特性変化の集積デバイスマトリックスアレイを用いた解析とキャラクタリゼーション
Author (3)：
OHKAWA S

About OHKAWA S

(Semiconductor Technol. Acad. Res. Center (STARC), Yokohama, JPN)

About Semiconductor Technol. Acad. Res. Center (STARC), Yokohama, JPN

, 
AOKI M

About AOKI M

(Tokyo Univ. Sci., Nagano, JPN)

About Tokyo Univ. Sci., Nagano, JPN

, 
MASUDA H

About MASUDA H

(Semiconductor Technol. Acad. Res. Center (STARC), Yokohama, JPN)

About Semiconductor Technol. Acad. Res. Center (STARC), Yokohama, JPN


Material：
IEEE Transactions on Semiconductor Manufacturing  (IEEE Trans Semicond Manuf)

About IEEE Transactions on Semiconductor Manufacturing


Volume： 17  Issue： 2  Page： 155-165  Publication year： May. 2004 
JST Material Number： T0521A  ISSN： 0894-6507  CODEN： ITSMED  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*characterization

About characterization

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices 
(NC03040G)

About Measurement,testing and reliability of solid-state devices

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
LSI

About LSI

, 
デバイス特性

About デバイス特性

, 
集積デバイス

About 集積デバイス

, 
マトリックスアレイ

About マトリックスアレイ

, 
解析

About 解析

, 
キャラクタリゼーション

About キャラクタリゼーション


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