Piezoelectric and optical properties of ZnO thin films deposited using various O<sub>2</sub>/(Ar+O<sub>2</sub>) gas ratios

KANG Seong Jun; JOUNG Yang Hee; CHANG Dong Hoon; KIM Kyoung Won

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J-GLOBAL ID：200902234104169905 Reference number：07A0509436

Piezoelectric and optical properties of ZnO thin films deposited using various O₂/(Ar+O₂) gas ratios

さまざまなO₂/(Ar+O₂)ガス比率を用いて成長したZnO薄膜の圧電特性と光学特性

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Volume： 18 Issue： 6 Page： 647-653 Publication year： Jun. 2007
JST Material Number： W0003A ISSN： 0957-4522 CODEN： JMTSAS Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films

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Piezoelectric and optical properties of ZnO thin films deposited using various O2/(Ar+O2) gas ratios

Piezoelectric and optical properties of ZnO thin films deposited using various O₂/(Ar+O₂) gas ratios