Control on the formation of Si nanodots fabricated by thermal annealing/oxidation of hydrogenated amorphous silicon

HAZRA S; SAKATA I; YAMANAKA M; SUZUKI E

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J-GLOBAL ID：200902235304520468 Reference number：05A0060741

Control on the formation of Si nanodots fabricated by thermal annealing/oxidation of hydrogenated amorphous silicon

水素化非晶質シリコンの熱アニール/酸化により作製したSiナノドットの形成制御

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Author (4)： , , ,
Material：
Volume： 96 Issue： 12 Page： 7532-7536 Publication year： Dec. 15, 2004
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor thin films

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