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J-GLOBAL ID:200902236116240128   Reference number:04A0229221

Wet etching study of silica glass after CW CO2 laser treatment

CW CO2レーザ処理後の石英ガラスのウェットエッチング
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Volume: 225  Issue: 1/4  Page: 250-255  Publication year: Mar. 30, 2004 
JST Material Number: B0707B  ISSN: 0169-4332  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Laser irradiation effects and damages  ,  Manufacturing technology of solid-state devices 
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