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J-GLOBAL ID：200902236355286920   Reference number：06A0015394

An overview of gallium nitride growth chemistry and its effect on reactor design: Application to a planetary radial-flow CVD system

窒化ガリウム成長化学とその反応室設計への影響の概要:プラネタリー半径流CVD装置への応用
Author (2)：
PARIKH Rinku P.

About PARIKH Rinku P.

(Dep. of Chemical and Biomolecular Engineering, Inst. for Systems Res., Univ. of Maryland, Coll. Park, MD 20742, USA)

About Dep. of Chemical and Biomolecular Engineering, Inst. for Systems Res., Univ. of Maryland, Coll. Park, MD 20742, USA

, 
ADOMAITIS Raymond A.

About ADOMAITIS Raymond A.

(Dep. of Chemical and Biomolecular Engineering, Inst. for Systems Res., Univ. of Maryland, Coll. Park, MD 20742, USA)

About Dep. of Chemical and Biomolecular Engineering, Inst. for Systems Res., Univ. of Maryland, Coll. Park, MD 20742, USA


Material：
Journal of Crystal Growth  (J Cryst Growth)

About Journal of Crystal Growth


Volume： 286  Issue： 2  Page： 259-278  Publication year： Jan. 15, 2006 
JST Material Number： B0942A  ISSN： 0022-0248  Document type： Article
Article type： 文献レビュー  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*gallium nitride

About gallium nitride

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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geometrical configuration

About geometrical configuration

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Crystal growth of semiconductors 
(BK13040X)

About Crystal growth of semiconductors

Terms in the title (9)：
Terms in the title
Keywords automatically extracted from the title.
窒化ガリウム

About 窒化ガリウム

, 
成長

About 成長

, 
化学

About 化学

, 
反応室

About 反応室

, 
設計

About 設計

, 
概要

About 概要

, 
半径流

About 半径流

, 
CVD装置

About CVD装置

, 
応用

About 応用


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