Art
J-GLOBAL ID:200902236752087119   Reference number:07A0215413

Hydrogenated Amorphous Carbon Nitride Films with Controlled Hydrogen Densities-Application to Electric Field Emission Devices

水素密度を制御した水素化非晶質窒化炭素薄膜 電界放出素子への応用
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Material:
Volume: 16  Issue:Page: 255-266  Publication year: 2006 
JST Material Number: L1952A  ISSN: 1344-9931  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Category name(code) classified by JST.
Carbon and its compounds  ,  Semiconductor thin films  ,  Electrolytic equipment 

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