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J-GLOBAL ID:200902240432462091   Reference number:04A0255484

Optimization and Properties of Zn Doped Indium Oxide Films on Plastic Substrate

プラスチック基板上のZnドープ酸化インジウム膜の最適化と特性
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Volume: 43  Issue:Page: 745-749  Publication year: Feb. 15, 2004 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Oxide thin films  ,  Electric conduction in crystalline semiconductors 
Reference (18):
  • 1) S. Sobajima, H. Okaniwa, N. Takagi, I. Sugiyama and K. Chiba: Proc. 6th Int. Vacume Congr., Jpn. J. Appl. Phys. 2 (1974) Suppl. 2-1, p. 475.
  • 2) H. Hara and T. Yatabe: Gekkan Display 5 (1999) 41 [in Japanese].
  • 3) T. Hanada, I. Shiroishi, N. Saito, T. Shiro and T. Yatabe: Proc. the Ninth Int. Display Workshop 2002, Hiroshima, p. 401.
  • 4) Y. Shigesato and D. C. Paine: Thin Solid Films 238 (1994) 44.
  • 5) Y. Shigesato, S. Takaki and T. Haranoh: J. Appl. Phys. 71 (1992) 3356.
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