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J-GLOBAL ID:200902240762288543   Reference number:03A0547360

Thin-Film Transistors on Plastic and Glass Substrates Using Silicon Deposited by Microwave Plasma ECR-CVD

マイクロ波プラズマECR-CVDにより堆積したシリコンを用いたプラスチックとガラス基板上の薄膜トランジスタ
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Volume: 24  Issue:Page: 399-401  Publication year: Jun. 2003 
JST Material Number: B0344B  ISSN: 0741-3106  CODEN: EDLEDZ  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Transistors  ,  Semiconductor thin films 

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