Art

J-GLOBAL ID：200902242600050708   Reference number：06A0962121

Wafer scale lead zirconate titanate film preparation by sol-gel method using stress balance layer

応力平衡層を用いたゾル-ゲル法によるウエハスケールのジルコニウム酸チタン酸鉛膜の作製

Author (5)： LU Jian (MEMS and Packaging Res. Group, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-2-1 Namiki, Tsukuba ...) ,  KOBAYASHI Takeshi (MEMS and Packaging Res. Group, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-2-1 Namiki, Tsukuba ...) ,  YI ZHANG (MEMS and Packaging Res. Group, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-2-1 Namiki, Tsukuba ...) ,  MAEDA Ryutaro (MEMS and Packaging Res. Group, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-2-1 Namiki, Tsukuba ...) ,  MIHARA Takashi (Future Creation Lab., Olympus Corp., Shinjuku Monolith, 3-1 Nishi-Shinjuku 2-chome, Shinjuku-ku, Tokyo, 163-0914, JPN)
Material： Thin Solid Films
Volume： 515  Issue： 4  Page： 1506-1510  Publication year： Dec. 05, 2006 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *sol-gel process ,...
Semi thesaurus term： *PZT

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JST classification (3)： Oxide thin films  (BK14050P) ,  Ferroelectrics,antiferroelectrics and ferroelasticity  (BM05030B) ,  Mechanical properties of solids in general  (BL01021C)

Terms in the title (7)： 応力 ,  平衡 ,  ゾル-ゲル法 ,  ウエハ ,  スケール ,  ジルコニウム酸チタン酸鉛 ,  作製