Rchr
J-GLOBAL ID：200901010788263701
Update date: Jan. 17, 2024
Kobayashi Takeshi
コバヤシ タケシ | Kobayashi Takeshi
Affiliation and department：
National Institute of Advanced Industrial Science and Technology
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Homepage URL (1)：
http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=T30928171
Research field (3)：
Inorganic materials
, Electronic devices and equipment
, Thin-film surfaces and interfaces
Research keywords (10)：
ゾルゲル
, 圧電ファイバ 反応・合成
, 圧電材料
, 低消費電力センサ
, 圧電センサ
, Power MEMS センサ
, MEMSセンサ
, 圧電MEMS MEMS
, MEMSデバイス
, MEMS
MISC (19)：
Jian Lu, Takeshi Kobayashi, Yi Zhang, Ryutaro Maeda, Takashi Mihara. Wafer scale lead zirconate titanate film preparation by sol-gel method using stress balance layer. THIN SOLID FILMS. 2006. 515. 4. 1506-1510
S. W. Youn, M. Takahashi, H. Goto, T. Kobayashi, R. Maeda. The effect of heat-treatment conditions on mechanical and morphological properties of a FIB-milled glassy carbon mold with micro patterns. JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2006. 16. 7. 1277-1284
T Kobayashi, J Tsaur, M Ichiki, R Maeda. Fabrication and performance of a flat piezoelectric cantilever obtained using a sol-gel derived PZT thick film deposited on a SOI wafer. SMART MATERIALS AND STRUCTURES. 2006. 15. 1. S137-S140
マイクロカンチレバの自励発振特性と自己検知自己駆動型AFMマイクロカンチレバの実現に向けた検討. 電子情報通信学会技術研究報告NLP. 2006. NLP2006. 29. 41-45
Micro Fabrication Technology of Ferroelectric Film and its Application to MEMS. WSEAS transactions on electronics. 2006. 3. 237-240
ｍore...
Association Membership(s) (2)：
エレクトロニクス実装学会
, 応用物理学会
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