Art
J-GLOBAL ID:200902245763104545   Reference number:09A0189335

Liquid Phase Deposition of Amorphous Carbon and Carbon Nitride Films

アモルファス炭素および窒化炭素膜の液相堆積
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Material:
Volume:Page: 102-106 (J-STAGE)  Publication year: 2009 
JST Material Number: U0016A  ISSN: 1348-0391  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds  ,  Inorganic compounds and elements in general 
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