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J-GLOBAL ID：200902246191492952   Reference number：06A0742176

Raman Spectra of DLC Films Prepared by Bipolar-type Plasma Based Ion Implantation

双極型プラズマ系のイオン打ち込みにより調製したDLC膜のRamanスペクトル

Author (6)： NAKAO Setsuo (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya) ,  KIM Jongduk (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya) ,  CHOI Junho (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya) ,  MIYAGAWA Soji (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya) ,  MIYAGAWA Yoshiko (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya) ,  IKEYAMA Masami (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya)
Material： Transactions of the Materials Research Society of Japan  (Trans Mater Res Soc Jpn)
Volume： 31  Issue： 3  Page： 685-688  Publication year： Sep. 2006 
JST Material Number： L4468A  ISSN： 1382-3469  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *DLC film ,...

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JST classification (3)： Manufacturing of ceramics and ceramic whiteware  (YC03020V) ,  Carbon and its compounds  (YB02060D) ,  Thin films of other inorganic compounds  (BK14060A)

Reference (18)：

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Terms in the title (5)： プラズマ ,  イオン打ち込み ,  調製 ,  DLC膜 ,  Ramanスペクトル