Chemical vapor deposition of thin graphite films of nanometer thickness

OBRAZTSOV A.n.; OBRAZTSOV A.n.; OBRAZTSOVA E.a.; TYURNINA A.v.; ZOLOTUKHIN A.a.

Art

J-GLOBAL ID：200902246686492584 Reference number：07A0820649

Chemical vapor deposition of thin graphite films of nanometer thickness

ナノメータ厚さの薄い黒鉛膜の化学蒸着

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Author (5)： , , , ,
Material：
Volume： 45 Issue： 10 Page： 2017-2021 Publication year： Sep. 2007
JST Material Number： H0270B ISSN： 0008-6223 CODEN： CRBNA Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Thin films of other inorganic compounds , Carbon and its compounds

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