Nanometer-Scale Metal Plating Using a Scanning Shear-Force Microscope with an Electrolyte-Filled Micropipette Probe

IWATA F; SUMIYA Y; SASAKI A

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J-GLOBAL ID：200902248153625054 Reference number：04A0658163

Nanometer-Scale Metal Plating Using a Scanning Shear-Force Microscope with an Electrolyte-Filled Micropipette Probe

電解液充填マイクロピペットプローブを備える走査型せん断力顕微鏡によるナノメータスケールの金属めっき

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Material：
Volume： 43 Issue： 7B Page： 4482-4485 Publication year： Jul. 30, 2004
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Electron and ion microscopes , Manufacturing technology of solid-state devices

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