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J-GLOBAL ID：200902248631377657   Reference number：05A0996458

Stress Control and Ferroelectric Properties of Lead Zirconate Titanate (PZT) Thin Film on Si Substrate with Buffer Layers

バッファ層を持つSi基板上のジルコン酸鉛チタン(PZT)薄膜の応力制御と強誘電性

Author (4)： FUJITO Keisuke (Tokyo Inst. of Technol., JPN) ,  WAKIYA Naoki (Tokyo Inst. of Technol., JPN) ,  MIZUTANI Nobuyasu (Tokyo Inst. of Technol., JPN) ,  SHINOZAKI Kazuo (Tokyo Inst. of Technol., JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 44  Issue： 9B  Page： 6900-6904  Publication year： Sep. 30, 2005 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： silicon ,...
Semi thesaurus term： *PZT ,...

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JST classification (2)： Ferroelectrics,antiferroelectrics and ferroelasticity  (BM05030B) ,  Oxide thin films  (BK14050P)

Reference (21)：

• 1) J. F. Scott: Ferroelectric Memories (Springer, Heidelberg, 2000) p. 23.
• 2) H. Morioka, S. Yokoyama, T. Oikawa, H. Funakubo and K. Saito: Appl. Phys. Lett. 85 (2004) 3516.
• 3) M. Aizawa, H. Nishiyama, K. Eguchi and H. Arai: J. Ceram. Soc. Jpn. 104 (1996) 677 [in Japanese].
• 4) Landolt-Bornstein: Numerical Data and Functional Relationship in Science and Technology (New Series, Group III, 1981) Vol. 13, p. 28.
• 5) Thermal expansion: Monmetallic Solids, Thermophysical Properties of Matter, The TPRC Data Series, Vol. 13, eds. Y. S. Touloukian, R. E. Taylor and T. Y. R. Lee (Plenum Press, 1977) p. 564, 570, 606.

Terms in the title (7)： バッファ層 ,  Si基板 ,  ジルコン酸鉛 ,  チタン ,  PZT ,  薄膜 ,  強誘電性