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J-GLOBAL ID：200902248999687745   Reference number：07A1055977

Measurement of Local Electrical Conductivity by Four-Point Probe Atomic Force Microscope Technique

4探針型原子間力顕微技術による局所領域における導電率の定量評価

Author (2)： KYO YO (東北大学大学院工学研究科) ,  SAKA MASUMI (東北大学大学院工学研究科)
Material： 材料  (Journal of the Society of Materials Science, Japan)
Volume： 56  Issue： 10  Page： 896-899 (J-STAGE)  Publication year： 2007 
JST Material Number： F0385A  ISSN： 0514-5163  CODEN： ZARYA  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *atomic force microscope ,...
Semi thesaurus term： 4探針型

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JST classification (1)： Measurement,testing and reliability of solid-state devices  (NC03040G)

Reference (10)：

• 1) A. V. Ermakov and B. J. Hinch, “Application of a novel contactless conductivity sensor in chemical vapor deposition of aluminum films”, Review of Scientific Instruments, Vol.68, No.8, pp.1571-1574 (1997).
• 2) Y. Ju, K. Inoue, M. Saka and H. Abé, “Contactless measurement of electrical conductivity of semiconductor wafers using the reflection of millimeter waves”, Applied Physics Letters, Vol.81, No.19, pp.3585-3587 (2002).
• 3) C. G. Wiegenstein and K. H. Schulz, “A four-points surface conductivity probe suitable for in situ ultrahigh vacuum conductivity measurements”, Review of Scientific Instruments, Vol.68, No.4, pp.1812-1813 (1997).
• 4) S. Hasegawa, X. Tong, C. S. Jiang, Y. Nakajima and T. Nagao, “Electrical conduction via surface-state bands”, Surface Science, Vol.386, No.1-3, pp.322-327 (1997).
• 5) C. L. Petersen, T. M. Hansen, P. Bøggild, A. Boisen, O. Hansen, T. Hassenkam and F. Grey, “Scanning microscopic four-point conductivity probes”, Sensors and Actuators A : Physical, Vol.96, No.1, pp.53-58 (2002).

Terms in the title (4)： 探針 ,  原子間力 ,  導電率 ,  定量評価