The effect of heat-treatment conditions on mechanical and morphological properties of a FIB-milled glassy carbon mold with micro patterns

YOUN S W; TAKAHASHI M; GOTO H; KOBAYASHI T; MAEDA R

Art

J-GLOBAL ID：200902250849959580 Reference number：06A0599010

The effect of heat-treatment conditions on mechanical and morphological properties of a FIB-milled glassy carbon mold with micro patterns

微細パターンをもつFIBミリングによるガラス状炭素モールドの機械的性質とモルフォロジー特性への熱処理条件の効果

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Material：
Volume： 16 Issue： 7 Page： 1277-1284 Publication year： Jul. 2006
JST Material Number： W1424A ISSN： 0960-1317 CODEN： JMMIEZ Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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