サブミクロンV溝の超精密マイクロ切削

MORITA SHIN'YA; ISHIKAWA SOICHI; SUZUKI TOORU; UEHARA YOSHIHIRO; KATAHIRA KAZUTOSHI; HAYASHI YOSHITAMI; OMORI HITOSHI; TAKEUCHI YOSHIMI

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J-GLOBAL ID：200902252247024000 Reference number：03A0845789

サブミクロンV溝の超精密マイクロ切削

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Material：
Volume： 2003 Issue：春季(CD-ROM) Page： 356 Publication year： Mar. 05, 2003
JST Material Number： Y0914A Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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