AlGaN/GaN Power HFET on Silicon Substrate With Source-Via Grounding (SVG) Structure

HIKITA Masahiro; YANAGIHARA Manabu; NAKAZAWA Kazushi; UENO Hiroaki; HIROSE Yutaka; UEDA Tetsuzo; UEMOTO Yasuhiro; TANAKA Tsuyoshi; UEDA Daisuke; EGAWA Takashi

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J-GLOBAL ID：200902252258388837 Reference number：05A0771217

AlGaN/GaN Power HFET on Silicon Substrate With Source-Via Grounding (SVG) Structure

ソース-バイア接地(SVG)構造を備えたシリコン基板上のAlGaN/GaNパワーHFET

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Volume： 52 Issue： 9 Page： 1963-1968 Publication year： Sep. 2005
JST Material Number： C0222A ISSN： 0018-9383 CODEN： IETDAI Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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