Art
J-GLOBAL ID：200902252337703101   Reference number：05A0393215

Adaptive vibration control of micro-cantilever beam in MEMS

MEMSにおけるマイクロ片持梁の適応振動制御
Author (3)：
ZHANG Wenming

About ZHANG Wenming

(Shanghai Jiao Tong Univ., Shanghai, CHN)

About Shanghai Jiao Tong Univ., Shanghai, CHN

, 
MENG Guang

About MENG Guang

(Shanghai Jiao Tong Univ., Shanghai, CHN)

About Shanghai Jiao Tong Univ., Shanghai, CHN

, 
LI HongGuang

About LI HongGuang

(Shanghai Jiao Tong Univ., Shanghai, CHN)

About Shanghai Jiao Tong Univ., Shanghai, CHN


Material：
Annual Conference of the IEEE Industrial Electronics Society  (Annual Conference on IEEE Industrial Electronics Society)

About Annual Conference of the IEEE Industrial Electronics Society


Volume： 30th Vol.3  Page： 2430-2435  Publication year： 2004 
JST Material Number： H0475B  ISSN： 1553-572X  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*atomic force microscope

About atomic force microscope

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
PZT

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JST classification (1)：
JST classification
Category name(code) classified by JST.
Microscopy determination of structures 
(BK01040E)

About Microscopy determination of structures

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
MEMS

About MEMS

, 
マイクロ

About マイクロ

, 
片持梁

About 片持梁

, 
適応

About 適応

, 
振動制御

About 振動制御


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