Effect of primary powder in aerosol deposition of aluminum nitride

IWATA Atsushi; AKEDO Jun

Art

J-GLOBAL ID：200902253529534067 Reference number：06A0095491

Effect of primary powder in aerosol deposition of aluminum nitride

窒化アルミニウムのエーロゾル析出における一次粉末の影響

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Material：
Volume： 30 Issue： 4 Page： 1021-1024 Publication year： Dec. 2005
JST Material Number： L4468A ISSN： 1382-3469 Document type： Proceedings
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Ceramic coating to nonmetallic materials , Techniques and equipment of thin film deposition

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