Art

J-GLOBAL ID：200902253866845783   Reference number：06A0602577

Simulation of microwave plasmas concentrated on the top surface of a diamond substrate with finite thickness

限定厚さのダイヤモンド基板表面に集中したマイクロ波プラズマのシミュレーション

Author (5)： YAMADA Hideaki (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...) ,  CHAYAHARA Akiyoshi (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...) ,  MOKUNO Yoshiaki (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...) ,  HORINO Yuji (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...) ,  SHIKATA Shinichi (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 15  Issue： 9  Page： 1383-1388  Publication year： Sep. 2006 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *Diamond ,...

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JST classification (1)： Thin films of other inorganic compounds  (BK14060A)

Terms in the title (5)： 厚さ ,  ダイヤモンド ,  基板表面 ,  マイクロ波プラズマ ,  シミュレーション