Art

J-GLOBAL ID：200902254583501723   Reference number：06A0161574

Investigation of DLC-Si coatings in large-scale production using DC-PACVD equipment

DC-PACVD装置を用いた大規模生産におけるDLC-Siコーティング

Author (6)： NAKANISHI K. (Toyota Central R&D Labs. Inc., Nagakute, Aichi, 480-1192, JPN) ,  MORI H. (Toyota Central R&D Labs. Inc., Nagakute, Aichi, 480-1192, JPN) ,  TACHIKAWA H. (Toyota Central R&D Labs. Inc., Nagakute, Aichi, 480-1192, JPN) ,  ITOU K. (NDK, Inc., 4-3-15 Minami-Hashimoto, Sagamihara, Kanagawa, 229-1133, JPN) ,  FUJIOKA M. (NDK, Inc., 21-1 Kakesita, Kutukake, Toyoake, Aichi, 470-1101, JPN) ,  FUNAKI Y. (NDK, Inc., 4-3-15 Minami-Hashimoto, Sagamihara, Kanagawa, 229-1133, JPN)
Material： Surface & Coatings Technology  (Surf Coat Technol)
Volume： 200  Issue： 14-15  Page： 4277-4281  Publication year： Apr. 10, 2006 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *plasma CVD ,...
Semi thesaurus term： AISI440C

   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=06A0161574&from=J-GLOBAL&jstjournalNo=D0205C") }}

JST classification (2)： Carbon and its compounds  (YB02060D) ,  Techniques and equipment of thin film deposition  (BK14020I)

Terms in the title (5)： DC ,  大規模 ,  DLC ,  Si ,  コーティング