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J-GLOBAL ID:200902256067339238   Reference number:05A0426716

超臨界流体を用いた微細構造上への酸化物薄膜の堆積

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Volume: 52nd  Issue:Page: 727  Publication year: Mar. 29, 2005 
JST Material Number: Y0054A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Oxide thin films  ,  Manufacturing technology of solid-state devices 
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