Art

J-GLOBAL ID：200902256870038158   Reference number：06A0574186

Silicon resonant microcantilevers for absolute pressure measurement

絶対圧力測定のためのシリコン共鳴マイクロカンチレバー

Author (12)： BIANCO S. (χ Lab, Materials and Microsystems Lab., Polytechnic of Turin, Lungo Piazza D’Armi 6, Chivasso, Turin 10034, ITA) ,  COCUZZA M. (χ Lab, Materials and Microsystems Lab., Polytechnic of Turin, Lungo Piazza D’Armi 6, Chivasso, Turin 10034, ITA) ,  FERRERO S. (χ Lab, Materials and Microsystems Lab., Polytechnic of Turin, Lungo Piazza D’Armi 6, Chivasso, Turin 10034, ITA) ,  GIURI E. (χ Lab, Materials and Microsystems Lab., Polytechnic of Turin, Lungo Piazza D’Armi 6, Chivasso, Turin 10034, ITA) ,  PIACENZA G. (χ Lab, Materials and Microsystems Lab., Polytechnic of Turin, Lungo Piazza D’Armi 6, Chivasso, Turin 10034, ITA) ,  PIRRI C. F. (χ Lab, Materials and Microsystems Lab., Polytechnic of Turin, Lungo Piazza D’Armi 6, Chivasso, Turin 10034, ITA) ,  RICCI A. (χ Lab, Materials and Microsystems Lab., Polytechnic of Turin, Lungo Piazza D’Armi 6, Chivasso, Turin 10034, ITA) ,  SCALTRITO L. (χ Lab, Materials and Microsystems Lab., Polytechnic of Turin, Lungo Piazza D’Armi 6, Chivasso, Turin 10034, ITA) ,  BICH D. (Olivetti I-Jet, Locality Le Vieux, Arnad, 11020 Aosta, ITA) ,  MERIALDO A. (Olivetti I-Jet, Locality Le Vieux, Arnad, 11020 Aosta, ITA) ,  SCHINA P. (Olivetti I-Jet, Locality Le Vieux, Arnad, 11020 Aosta, ITA) ,  CORREALE R. (Varian SpA, Via Fratelli Varian 54, Leini, 10040 Turin, ITA)
Material： Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)
Volume： 24  Issue： 4  Page： 1803-1809  Publication year： Jul. 2006 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *pressure measurement ,...
Semi thesaurus term： pressure dependence ,...

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JST classification (3)： Measuring methods and instruments of force,work load,pressure,friction  (AD05050V) ,  Vacuum production and techniques  (BA02020L) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (4)： 圧力測定 ,  シリコン ,  共鳴 ,  マイクロカンチレバー