Art
J-GLOBAL ID:200902256870038158   Reference number:06A0574186

Silicon resonant microcantilevers for absolute pressure measurement

絶対圧力測定のためのシリコン共鳴マイクロカンチレバー
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Volume: 24  Issue:Page: 1803-1809  Publication year: Jul. 2006 
JST Material Number: E0974A  ISSN: 1071-1023  CODEN: JVTBD9  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Measuring methods and instruments of force,work load,pressure,friction  ,  Vacuum production and techniques  ,  Manufacturing technology of solid-state devices 
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