Art

J-GLOBAL ID：200902257186990512   Reference number：05A0521900

Survival coefficient of Ga(5s²S1/2) sputtered from a GaAs surface

GaAs表面からスパッタされたGa(5s²S_1/2)の残存係数

Author (2)： TSURUBUCHI Seiji (Dep. of Applied Physics, Tokyo Univ. of Agriculture and Technol., Naka-cho 2-24-16, Koganei-shi, Tokyo 184-8588, JPN) ,  NIMURA Tomoaki (Dep. of Applied Physics, Tokyo Univ. of Agriculture and Technol., Naka-cho 2-24-16, Koganei-shi, Tokyo 184-8588, JPN)
Material： Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
Volume： 232  Issue： 1-4  Page： 159-164  Publication year： May. 2005 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *gallium arsenide ,...

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JST classification (1)： Sputtering  (BK16110U)

Terms in the title (5)： GaAs ,  スパッタ ,  Ga ,  残存 ,  係数