Pulsed Laser Deposition of High-Quality (K,Na)NbO<sub>3</sub> Thin Films on SrTiO<sub>3</sub> Substrate Using High-Density Ceramic Targets

SAITO T; WADA T; ADACHI H; KANNO I

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J-GLOBAL ID：200902258811776342 Reference number：04A0794093

Pulsed Laser Deposition of High-Quality (K,Na)NbO₃ Thin Films on SrTiO₃ Substrate Using High-Density Ceramic Targets

高密度セラミックターゲットを使ったSrTiO₃基板上への高品質(K,Na)NbO₃薄膜のパルスレーザ堆積

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Material：
Volume： 43 Issue： 9B Page： 6627-6631 Publication year： Sep. 30, 2004
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Techniques and equipment of thin film deposition , Thin films of other inorganic compounds

Reference (12)：

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5) S. Tahiro, H. Nagamatsu and K. Nagata: Jpn. J. Appl. Phys. 41 (2002) 7113.

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Pulsed Laser Deposition of High-Quality (K,Na)NbO3 Thin Films on SrTiO3 Substrate Using High-Density Ceramic Targets

Pulsed Laser Deposition of High-Quality (K,Na)NbO₃ Thin Films on SrTiO₃ Substrate Using High-Density Ceramic Targets