Crystallographic characterization of epitaxial Pb(Zr,Ti)O<sub>3</sub> films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering

KANNO I; KOTERA H; WASA K; MATSUNAGA T; KAMADA T; TAKAYAMA R

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J-GLOBAL ID：200902290250878591 Reference number：03A0254978

Crystallographic characterization of epitaxial Pb(Zr,Ti)O₃ films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering

高周波マグネトロンスパッタリングで成長させたZr/Ti比の異なるエピタキシャルPb(Zr,Ti)O₃膜の結晶学的特性評価

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Author (6)： , , , , ,
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Volume： 93 Issue： 7 Page： 4091-4096 Publication year： Apr. 01, 2003
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films

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Crystallographic characterization of epitaxial Pb(Zr,Ti)O3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering

Crystallographic characterization of epitaxial Pb(Zr,Ti)O₃ films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering