Art

J-GLOBAL ID：200902258931818510   Reference number：07A0679667

Achieving 63 pm Resolution in Scanning Transmission Electron Microscope with Spherical Aberration Corrector

球面収差補正器を有する走査透過型電子顕微鏡での63pm分解能の達成

Author (25)： SAWADA Hidetaka (JST-CREST, Saitama, JPN) ,  HOSOKAWA Fumio (JST-CREST, Saitama, JPN) ,  KANEYAMA Toshikatsu (JST-CREST, Saitama, JPN) ,  ISHIZAWA Toshihiro (JEOL Ltd., Tokyo, JPN) ,  TERAO Mitsuhisa (JEOL Ltd., Tokyo, JPN) ,  KAWAZOE Muneyuki (JEOL Ltd., Tokyo, JPN) ,  SANNOMIYA Takumi (JST-CREST, Saitama, JPN) ,  TOMITA Takeshi (JST-CREST, Saitama, JPN) ,  KONDO Yukihito (JST-CREST, Saitama, JPN) ,  TANAKA Takayuki (JST-CREST, Saitama, JPN) ,  OSHIMA Yoshifumi (JST-CREST, Saitama, JPN) ,  TANISHIRO Yasumasa (JST-CREST, Saitama, JPN) ,  YAMAMOTO Naoki (JST-CREST, Saitama, JPN) ,  TAKAYANAGI Kunio (JST-CREST, Saitama, JPN) ,  SAWADA Hidetaka (JEOL Ltd., Tokyo, JPN) ,  HOSOKAWA Fumio (JEOL Ltd., Tokyo, JPN) ,  KANEYAMA Toshikatsu (JEOL Ltd., Tokyo, JPN) ,  SANNOMIYA Takumi (JEOL Ltd., Tokyo, JPN) ,  TOMITA Takeshi (JEOL Ltd., Tokyo, JPN) ,  KONDO Yukihito (JEOL Ltd., Tokyo, JPN) ,  TANAKA Takayuki (Tokyo Inst. of Technol., Tokyo, JPN) ,  OSHIMA Yoshifumi (Tokyo Inst. of Technol., Tokyo, JPN) ,  TANISHIRO Yasumasa (Tokyo Inst. of Technol., Tokyo, JPN) ,  YAMAMOTO Naoki (Tokyo Inst. of Technol., Tokyo, JPN) ,  TAKAYANAGI Kunio (Tokyo Inst. of Technol., Tokyo, JPN)
Material： Japanese Journal of Applied Physics. Part 2. Letters  (Japanese Journal of Applied Physics. Part 2. Letters & Express Letters)
Volume： 46  Issue： 20-24  Page： L568-L570  Publication year： Jun. 25, 2007 
JST Material Number： F0599B  ISSN： 0021-4922  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *scanning transmisson electron microscope ,...
Semi thesaurus term： *STEM

   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=07A0679667&from=J-GLOBAL&jstjournalNo=F0599B") }}

JST classification (1)： Microscopy determination of structures  (BK01040E)

Terms in the title (3)： 球面収差補正 ,  走査透過型電子顕微鏡 ,  分解能