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J-GLOBAL ID：200902259243335901   Reference number：07A0548829

Properties of light-emitting porous silicon photoetched in aqueous HF/FeCl3 solution

HF/FeCl3水溶液中でフォトエッチングした発光多孔質シリコンの特性
Author (2)：
XU Yan Kai

About XU Yan Kai

(Dep. of Electronic Engineering, Fac. of Engineering, Gunma Univ., Kiryu-shi, Gunma 376-8515, JPN)

About Dep. of Electronic Engineering, Fac. of Engineering, Gunma Univ., Kiryu-shi, Gunma 376-8515, JPN

, 
ADACHI Sadao

About ADACHI Sadao

(Dep. of Electronic Engineering, Fac. of Engineering, Gunma Univ., Kiryu-shi, Gunma 376-8515, JPN)

About Dep. of Electronic Engineering, Fac. of Engineering, Gunma Univ., Kiryu-shi, Gunma 376-8515, JPN


Material：
Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)

About Journal of Applied Physics


Volume： 101  Issue： 10  Page： 103509  Publication year： May. 15, 2007 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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semiconductor thin film

About semiconductor thin film

,...
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Thesaurus term/Semi thesaurus term
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FTIR spectra

About FTIR spectra


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Luminescence of semiconductors 
(BM08092S)

About Luminescence of semiconductors

,  Surface structure of semiconductors 
(BK15030A)

About Surface structure of semiconductors

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
HF

About HF

, 
FeCl3

About FeCl3

, 
水溶液

About 水溶液

, 
フォトエッチング

About フォトエッチング

, 
多孔質シリコン

About 多孔質シリコン


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