Art
J-GLOBAL ID：200902259270476789   Reference number：04A0511819

Nucleation mechanism of microcrystalline silicon from the amorphous phase

非晶質相から微結晶シリコンの核生成機構
Author (3)：
FUJIWARA H

About FUJIWARA H

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN

, 
KONDO M

About KONDO M

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN

, 
MATSUDA A

About MATSUDA A

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN


Material：
Journal of Non-Crystalline Solids  (J Non-Cryst Solid)

About Journal of Non-Crystalline Solids


Volume： 338/340  Page： 97-101  Publication year： Jun. 15, 2004 
JST Material Number： D0642A  ISSN： 0022-3093  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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amorphous semiconductor

About amorphous semiconductor

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

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,  Salts 
(CD01050V)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
非晶質相

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, 
微結晶シリコン

About 微結晶シリコン

, 
核生成

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