Art
J-GLOBAL ID：200902260155039233
Reference number：06A0340263
Investigation of Quartz Side Wall Influence on Radial Plasma Density Profiles in Low-Pressure Surface Wave Plasma Source
低圧表面波プラズマ源におけるラジカルプラズマ密度分布に与える石英側壁影響の検討
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Author (4)：
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Material：
Volume：
45
Issue：
4A
Page：
2749-2756
Publication year：
Apr. 15, 2006
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Plasma in general
, Electromagnetic waves in plasma
Terms in the title (6)：
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