Art

J-GLOBAL ID：200902260555579652   Reference number：09A0717260

Thermally stable very thin Ag films for electrodes

電極のための熱安定極薄Ag膜

Author (5)： KAWAMURA M. (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Koen-cho 165, Hokkaido 090-8507, JPN) ,  FUKUDA D. (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Koen-cho 165, Hokkaido 090-8507, JPN) ,  INAMI Y. (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Koen-cho 165, Hokkaido 090-8507, JPN) ,  ABE Y. (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Koen-cho 165, Hokkaido 090-8507, JPN) ,  SASAKI K. (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Koen-cho 165, Hokkaido 090-8507, JPN)
Material： Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)
Volume： 27  Issue： 4  Page： 975  Publication year： Jul. 2009 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *Silver ,  *metallic thin film ,  *electrode ,  thin film transistor ,  liquid crystal display ,  Aluminum ,  *thermal stability ,  *thickness of strata ,  *electrical resistivity ,  *annealing (phenomenon) ,  agglomeration ,  surface morphology

JST classification (3)： Metallic thin films  (BK14030T) ,  Materials of solid-state devices  (NC03020K) ,  Electronic conduction in metals in general  (BM03031E)

Terms in the title (1)： Ag