Art
J-GLOBAL ID:200902260976762928   Reference number:03A0547794

Improvement in retention time of metal-ferroelectric-metal- insulator-semiconductor structures using MgO doped Ba0.7Sr0.3TiO3 insulator layer

MgOドープBa0.7Sr0.3TiO3絶縁層を用いた金属-強誘電体-金属-絶縁体-半導体構造における保持時間の改善
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Material:
Volume: 83  Issue:Page: 981-983  Publication year: Aug. 04, 2003 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLAB  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Ferroelectrics,antiferroelectrics and ferroelasticity  ,  Oxide thin films  ,  Semiconductor integrated circuit 
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