Art

J-GLOBAL ID：200902263901427430   Reference number：06A0602579

Numerical analysis of power absorption and gas pressure dependence of microwave plasma using a tractable plasma description

扱いやすいプラズマ記述を用いてのマイクロ波プラズマの電力吸収とガス圧依存性の数値解析

Author (6)： YAMADA Hideaki (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...) ,  CHAYAHARA Akiyoshi (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...) ,  MOKUNO Yoshiaki (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...) ,  SODA Yousuke (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...) ,  HORINO Yuji (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...) ,  FUJIMORI Naoji (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 15  Issue： 9  Page： 1395-1399  Publication year： Sep. 2006 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *Diamond ,...
Semi thesaurus term： pressure dependence ,...

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JST classification (1)： Thin films of other inorganic compounds  (BK14060A)

Terms in the title (6)： プラズマ ,  記述 ,  マイクロ波プラズマ ,  ガス圧 ,  依存性 ,  数値解析