Art
J-GLOBAL ID：200902264140594848   Reference number：07A0979063

Polymer self assembly in semiconductor microelectronics

半導体マイクロエレクトロニクスにおけるポリマー自己組織化
Author (8)：
BLACK C. T.

About BLACK C. T.

(Brookhaven National Lab., New York)

About Brookhaven National Lab., New York

, 
RUIZ R.

About RUIZ R.

(Hitachi Global Storage Technol., California)

About Hitachi Global Storage Technol., California

, 
BREYTA G.

About BREYTA G.

(IBM Res. Div., California)

About IBM Res. Div., California

, 
CHENG J. Y.

About CHENG J. Y.

(IBM Res. Div., California)

About IBM Res. Div., California

, 
COLBURN M. E.

About COLBURN M. E.

(IBM Res. Div., New York)

About IBM Res. Div., New York

, 
GUARINI K. W.

About GUARINI K. W.

(IBM Systems and Technol. Group, New York)

About IBM Systems and Technol. Group, New York

, 
KIM H.-C.

About KIM H.-C.

(IBM Res. Div., California)

About IBM Res. Div., California

, 
ZHANG Y.

About ZHANG Y.

(IBM Res. Div., New York)

About IBM Res. Div., New York


Material：
IBM Journal of Research and Development  (IBM J Res Dev)

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Volume： 51  Issue： 5  Page： 605-633  Publication year： Sep. 2007 
JST Material Number： D0061B  ISSN： 0018-8646  CODEN： IBMJAE  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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semiconductor

About semiconductor

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
semiconductor element

About semiconductor element

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
マイクロエレクトロニクス

About マイクロエレクトロニクス

, 
ポリマー

About ポリマー

, 
自己組織化

About 自己組織化


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