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J-GLOBAL ID:200902264275652589   Reference number:08A0569166

Deposition of DLC film from adamantane by using pulsed discharge plasma CVD

パルス放電プラズマCVD法を用いたアダマンタンからのDLC膜の蒸着
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Volume: 17  Issue: 4-5  Page: 684-687  Publication year: Apr. 2008 
JST Material Number: W0498A  ISSN: 0925-9635  Document type: Article
Article type: 短報  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds  ,  Carbon and its compounds 
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