Art
J-GLOBAL ID:200902264996787990   Reference number:03A0294585

Novel floating-type low-energy ion gun for high-resolution depth profiling in ultrahigh vacuum

超高真空における高分解能深さ方向分析のための新規の浮動式低エネルギーイオン銃
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Material:
Volume: 35  Issue:Page: 382-386  Publication year: Apr. 2003 
JST Material Number: E0709A  ISSN: 0142-2421  CODEN: SIANDQ  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Sputtering  ,  Surface chemistry in general  ,  Manufacturing technology of solid-state devices 

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