Art
J-GLOBAL ID：200902265033145433   Reference number：07A1048403

Laser fabrication of high-aspect-ratio holes and grooves in photoresist by time constant manipulation

時定数操作によるフォトレジストへの高アスペクト比の穴と溝のレーザ加工
Author (2)：
EGAMI C.

About EGAMI C.

(Fac. of Engineering, Shizuoka Univ., 3-5-1 Johoku, Hamamatsu 432-8561, JPN)

About Fac. of Engineering, Shizuoka Univ., 3-5-1 Johoku, Hamamatsu 432-8561, JPN

, 
LIU Y.

About LIU Y.

(Fac. of Engineering, Shizuoka Univ., 3-5-1 Johoku, Hamamatsu 432-8561, JPN)

About Fac. of Engineering, Shizuoka Univ., 3-5-1 Johoku, Hamamatsu 432-8561, JPN


Material：
Optics Communications  (Opt Commun)

About Optics Communications


Volume： 280  Issue： 1  Page： 188-191  Publication year： Dec. 01, 2007 
JST Material Number： A0678B  ISSN： 0030-4018  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*photoresist

About photoresist

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages 
(BK16040S)

About Laser irradiation effects and damages

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
時定数

About 時定数

, 
フォトレジスト

About フォトレジスト

, 
高アスペクト比

About 高アスペクト比

, 
レーザ加工

About レーザ加工


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