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J-GLOBAL ID：200902265348228060   Reference number：05A0253901

A survey on micro metrology for dimensional standard

マイクロ三次元幾何標準の実現方法に関する調査研究
Author (1)：
SATO OSAMU

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(産業技術総合研 計測標準研究部門)

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Material：
産総研計量標準報告  (AIST Bulletin of Metrology)

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Volume： 3  Issue： 4  Page： 559-568  Publication year： Feb. 2005 
JST Material Number： F0410B  ISSN： 1347-1473  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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3-D measurement

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
machining accuracy

About machining accuracy


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

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Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
マイクロ

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, 
幾何

About 幾何

, 
標準

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, 
調査

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, 
研究

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