Rchr

J-GLOBAL ID：200901004364742243 Update date: May. 17, 2020

Sato Osamu

サトウオサム | Sato Osamu

Affiliation and department：
Homepage URL (1)： http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=O23007371
MISC (5)：

I. Misumi, S. Gonda, O. Sato, K. Sugawara, K. Yoshizaki, T. Kurosawa, T. Takatsuji. Nanometric lateral scale development using an atomic force microscope with directly traceable laser interferometers. MEASUREMENT SCIENCE AND TECHNOLOGY. 2006. 17. 7. 2041-2047
Interference effect in optical beam deflection detection system of dynamic AFMs and its influence on micro-profile measurement. MEASUREMENT SCIENCE & TEMHNOLOGY. 2006
QX Huang, S Gonda, Misumi, I, O Sato, T Keem, T Kurosawa. Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement. SENSORS AND ACTUATORS A-PHYSICAL. 2006. 125. 2. 590-596
マイクロ三次元幾何標準の実現方法に関する調査研究. 産総研計量標準報告. 2005. 3. 4. 559-568
O Sato, K Shimojima, R Furutani, K Takamasu. Artefact calibration of parallel mechanism, kinematic calibration with a priori knowledge. MEASUREMENT SCIENCE AND TECHNOLOGY. 2004. 15. 6. 1158-1165

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