Studies on key nano-fabrication processes for GaAs-based air-bridge-type two-dimensional photonic-crystal slab waveguides

IKEDA Naoki; IKEDA Naoki; SUGIMOTO Yoshimasa; SUGIMOTO Yoshimasa; TANAKA Yu; INOUE Kuon; ODA Hisaya; WATANABE Yoshinori; ASAKAWA Kiyoshi; ASAKAWA Kiyoshi

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J-GLOBAL ID：200902270083989067 Reference number：07A0171086

Studies on key nano-fabrication processes for GaAs-based air-bridge-type two-dimensional photonic-crystal slab waveguides

GaAsを基本とするエアブリッジ型の2次元フォトニック結晶を用いた板状導波路において重要な役割を果たすナノ組み立て工程に関する研究

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Material：
Volume： 22 Issue： 2 Page： 149-157 Publication year： Feb. 2007
JST Material Number： E0503B ISSN： 0268-1242 CODEN： SSTEET Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Optical waveguide,optical fibers,and fiber optics

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