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J-GLOBAL ID：200902270203477600   Reference number：07A0478889

Optical Constants of β-FeSi₂ Film on Si Substrate Obtained from Transmittance and Reflectance Data and Origin of Urbach Tail

透過と反射のデータから得たSi基板上のβ-FeSi₂膜の光学定数とUrbachテイルの起源

Author (5)： KAKEMOTO Hirofumi (Tokyo Inst. of Technol., Tokyo, JPN) ,  HIGUCHI Tohru (Tokyo Univ. Sci., Tokyo, JPN) ,  SHIBATA Hajime (National Inst. of Advanced Industrial Sci. and Technol., Ibaraki, JPN) ,  WADA Satoshi (Tokyo Inst. of Technol., Tokyo, JPN) ,  TSURUMI Takaaki (Tokyo Inst. of Technol., Tokyo, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 46  Issue： 4B  Page： 2405-2408  Publication year： Apr. 30, 2007 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *optical constant ,...

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JST classification (1)： Semiconductor thin films  (BK14040E)

Reference (10)：

• M. C. Bost and J. E. Mahan: J. Appl. Phys.58(1985)2696.
• S. Mantl: Nucl. Instrum. Methods Phys. Res., Sect. B 84(1994)127.
• C. A. Dimitriadis, J. H. Werner, S. Logothetidis, M. Stutzmann, J. Weber, and R. Nesper: J. Appl. Phys.68(1990)1726.
• A. B. Filonov, D. B. Migas, V. L. Shaposhnikow, N. N. Dorozhkin, G. V. Petrov, V. E. Borisenko, W. Henrion, and H. Lange: J. Appl. Phys.79(1996)7708.
• N. E. Christensen: Phys. Rev. B 42(1990)7148.

Terms in the title (4)： Si基板 ,  光学定数 ,  テイル ,  起源