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J-GLOBAL ID:200902270901455073   Reference number:05A0586479

Environmentally Friendly Positive- and Negative-tone Photo-patterning Systems of Low-K and Low-CTE Polyimides

低い-Kと低い-CTEポリイミドの環境に優しいポジティブ-とネガティブトーン光パターニング系
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Material:
Volume: 18  Issue:Page: 307-312  Publication year: 2005 
JST Material Number: L0202A  ISSN: 0914-9244  CODEN: JSTEEW  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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JST classification
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Copolymerization  ,  Manufacturing technology of solid-state devices 
Reference (13):
  • 1. The Latest Polyimides: Fundamentals and Applications, Y. Imai and R. Yokota, Eds., NTS, Tokyo, 2002. (in Japanese)
  • 2. S. Numata, S. Oohara, K. Fujisaki, K. Imaizumi and N. Kinjyo, J. Appl. Polym. Sci. 31 (1986) 101.
  • 3. S. Numata, K. Fujisaki and N. Kinjyo, Polymer 28 (1987) 2282.
  • 4. M. Hasegawa, T. Matano, Y. Shindo and T. Sugimura, Macromolecules 29 (1996) 7897.
  • 5. J. C. Coburn and M. T. Pottiger, Polyimides: Fundamentals and Applications, M. K. Ghosh and K. L. Mittal, Eds., Marcel Dekker, New York, 1996, p 207
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