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J-GLOBAL ID:200902271126630900   Reference number:06A0097801

Fabrication of Small Fluorescence Scale Patterns by Electron Beam Drawing Using Polymer Film Containing Fluorescence Dye

蛍光色素を含む高分子膜を用いた電子ビーム描画による小蛍光目盛パターンの製作
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Material:
Volume: 13  Issue:Page: 24-28  Publication year: Feb. 01, 2006 
JST Material Number: L2272A  ISSN: 1340-6000  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Optical instruments and techniques in general  ,  Manufacturing technology of solid-state devices  ,  Thin films of organic compounds 
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